Pressure-less ozonated di-water (DIO3) recirculation reclaim system

ABSTRACT

The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure.

CROSS REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. Ser. No. 14/710,255 filed onMay 12, 2015, which is a divisional of U.S. Ser. No. 13/836,842 filed onMar. 15, 2013 and claims the benefit of and priority to U.S. ProvisionalPatent Application No. 61/724,006, filed Nov. 8, 2012, which are ownedby the assignee of the instant application and the entire disclosures ofwhich are incorporated herein by reference.

FIELD OF THE INVENTION

In general, the invention relates to devices, systems and methodsemployed in wet cleaning semiconductor devices. In particular, theinvention relates to a system that can purge can recirculate liquids andcan purge unwanted gas from the liquid to be recirculated.

BACKGROUND OF THE INVENTION

Microelectronics chips such as integrated circuits are made fromcomparatively large wafers of semiconductor material. This processtypically involves multiple successive steps including the following:generation of an etch mask photolithographically; etching of a layer ofmaterial as defined by the mask; removal of the photolithographic maskthrough some combination of wet and dry chemical techniques; removal ofoxide layers prior to further processing; deposition of layers ofmaterials; and/or rinsing to remove residual chemistry. Thephotolithographic mask can be formed from a polymeric material called aphotoresist. After the photoresist mask has been removed, a finalcleaning step, called rinsing and/or wet cleaning is typicallyperformed. In some systems, cleaning steps are also applied betweenother processing steps.

Ozonated deionized water (DIO₃-water) is known for its use in thesemiconductor industry for, for example, wet cleaning processes and/oretching of tungsten layers. However, DIO₃ is not a stable fluid. Forexample, the ozone can decay with a half-life time of approximatelytwelve minutes (depending upon temperature, water chemistry, etc.).Current systems typically address this problem by operating a constantflow of DIO₃ that is both expensive and wasteful.

SUMMARY OF THE INVENTION

One advantage of the invention is that the cost associated withoperating a fluid delivery system (e.g., for wet wafer processing) isreduced. Another advantage of the invention is that it can use aparticle free pump (e.g., a centrifugal pump). Another advantage of theinvention is that it can supply a continuous flow of DIO₃ that is lesswasteful than current systems. Another advantage of the invention isthat off-gas from the fluid delivery system can be a second time.Another advantage of the invention is that one compact vessel can beused.

In one aspect, the invention provides a system for recirculatingozonated liquid. The system includes a contactor including at least twoinlets and at least two outlets. The contactor is in fluid communicationwith a first liquid source at a first contactor inlet and a secondliquid source at a second contactor inlet, and the second contactorinlet receives gas that purges at least a portion of gas from liquidreceived at the first contactor inlet. The purged gas exits thecontactor at a first contactor outlet. The contactor is in fluidcommunication with the second liquid source at a second contactoroutlet, and the contactor drains at least a portion of the liquid in thecontactor, the drained liquid exiting the contactor at the secondcontactor outlet. The contactor includes a third inlet in fluidcommunication with the first liquid source, the third inlet allowing thefirst liquid source to release liquid at an ambient pressure.

In some embodiments, at least a portion of the liquid received at thefirst contactor inlet comprises at least a portion of the liquid drainedfrom the contactor via the second contactor outlet.

In some embodiments, the contactor includes a fourth inlet in fluidcommunication with a third a liquid source, the fourth inlet receivingfresh liquid from the third liquid source that replaces at least aportion of the liquid drained from the contactor.

In some embodiments, the contactor includes any of a packed column,plate column, or bubble column.

In some embodiments, the system includes a first pump in fluidcommunication with the contactor via a) at least one inlet of the firstpump being in fluid communication with the second outlet of thecontactor, and b) an outlet of the first pump being in fluidcommunication with the second liquid source.

In some embodiments, the outlet of the first pump is in fluidcommunication with the contactor via a fourth inlet of the contactor.

In some embodiments, the first pump includes a centrifugal pump.

In some embodiments, the system includes a destruct component thatincludes at least an inlet, the inlet of the destruct component in fluidcommunication with the first contactor outlet. In some embodiments, theinlet of the destruct component receives at least a portion of the gaspurged by the contactor.

In some embodiments, the gas received at the first inlet of the destructcomponent is heated or diluted with Clean Dry Air (CDA) or other inertgas.

In some embodiments, an outlet of the destruct component exhausts atleast a portion of the purged gas received at the inlet of the destructcomponent.

In some embodiments, the gas flow at the outlet of the destructcomponent is measured and the information is used for system control.

In some embodiments, the destruct component uses a catalyst to convertthe received gas into oxygen and exhausts the oxygen via the outlet ofthe destruct component. In some embodiments, the catalyst comprises anyof (i) manganese-oxide based product or (ii) a carbon-based product.

In some embodiments, any of the liquid (i) received at the first inletof the contactor or (ii) drained from the second outlet of thecontactor, comprises ozonated deionized water (DIO₃).

In some embodiments, the gas received at the first inlet of thecontactor comprises (i) O₃, (ii) O₂, (iii) CO₂, (iv) N₂, (iv) Clean DryAir (CDA), (v) inert gas, (vi) doping gas, (vii) off-gas, (viii) off-gasfrom the second liquid source, or any combination thereof.

In some embodiments, the portion of gas purged from the liquid comprises(i) O₃, (ii) O₂ (iii) CO₂, or any combination thereof. In someembodiments, the gas received at the first inlet of the contactor is theoff-gas from the second liquid source.

In some embodiments, the first liquid source includes a tool used in asemiconductor manufacturing process.

In some embodiments, a temperature of the liquid is measured and atemperature of the liquid is controlled via a heat exchanger or byliquid discarding.

In some embodiments, the second liquid source includes a DIO₃ waterdelivery system.

In another aspect, the invention includes a system for recirculatingozonated liquid. The system includes a first contactor including atleast four inlets and at least two outlets, wherein the first contactoris in fluid communication with a first liquid source at a first inlet ofthe first contactor, the second inlet of the first contactor receivinggas that purges a first portion of gas from liquid received at the firstinlet of the first contactor, the purged gas exiting the first contactorat a first outlet of the first contactor, the first contactor drainingat least a portion of the liquid in the contactor, the drained liquidexiting the first contactor at the second outlet of the first contactor.The system also includes a second contactor including at least one inletand at least one outlet, wherein the second contactor is in fluidcommunication with the first contactor at a first inlet of the secondcontactor and a first outlet of the second contactor, the first inlet ofthe second contactor receiving the liquid from the first outlet of thefirst contactor, the second contactor purging a second portion of gasfrom the liquid, the first outlet of the second contactor releasing theliquid having the second portion of gas purged to the first contactorvia a third inlet of the first contactor that is in fluid communicationwith the first outlet of the second contactor, and wherein the firstcontactor includes a fourth inlet in fluid communication with the firstliquid source, the fourth inlet of the first contactor allowing thefirst liquid source to release liquid at an ambient pressure.

In another aspect, the invention provides a method for recirculatingozonated liquid. The method involves supplying a liquid and a gas to acontactor; purging, with the gas, at least a portion of gas from theliquid; and draining a portion of the liquid from the contactor.

In some embodiments, the liquid is supplied to the contactor at anambient pressure.

In some embodiments, the method involves supplying at least a portion ofthe liquid drained from the contactor back to the contactor.

In some embodiments, the method involves replacing at least a portion ofliquid drained from the contactor with a fresh liquid.

In some embodiments, the method involves pressurizing the liquid drainedfrom the contactor via a first pump.

In some embodiments, the method involves removing at least a portion ofgas from the first pump via a second pump.

In some embodiments, the method involves heating or diluting the purgedgas with CDA or other inert gas.

In some embodiments, the method involves converting the purged gas intoO₂. In some embodiments, the method involves outputting the convertedgas. In some embodiments, the method involves measuring a gas flow ofthe output gas and using the information for system control.

In some embodiments, the method involves measuring and/or controlling atemperature of the liquid via a heat exchanger or by liquid discarding.

In some embodiments, the liquid supplied to the contactor comprisesozonated deionized water (DIO₃).

In some embodiments, the gas is (i) O₃, (ii) O₂, (iii) CO₂, (iv) N₂,(iv) Clean Dry Air (CDA), (v) inert gas, (vi) doping gas, (vii) off-gas,(viii) off-gas from the second liquid source, or any combinationthereof.

In some embodiments, the portion of gas purged from the liquid comprises(i) O₃, (ii) O₂ (iii) CO₂, or any combination thereof.

In some embodiments, the liquid is supplied to the contactor from a toolused in a semiconductor manufacturing process.

BRIEF DESCRIPTION OF THE DRAWINGS

The advantages of the invention described above, together with furtheradvantages, may be better understood by referring to the followingdescription taken in conjunction with the accompanying drawings. Thedrawings are not necessarily to scale; emphasis instead is generallyplaced upon illustrating the principles of the invention.

FIG. 1A is a diagram of a system for recirculating and reclaiming liquid(e.g., ozonated deionized water), according to an illustrativeembodiment of the invention.

FIG. 1B is a diagram of a system for recirculating and reclaiming liquid(e.g., ozonated deionized water), according to an illustrativeembodiment of the invention.

FIG. 2A is a flow chart illustrating a method for recirculating liquid,according to an illustrative embodiment of the invention; and

FIG. 2B is a flow chart illustrating a method for degassing liquid,according to an illustrative embodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

System Overview

In general, the invention includes systems and methods for reclaimingand reusing liquid expelled from a tool (e.g., a semiconductor processmanufacturing tool). For example, an ozonated deionized water (DIO₃)fluid delivery system can provide DIO₃ to a semiconductor manufacturingprocessing tool. The semiconductor manufacturing tool expels a portionof the DIO₃ (e.g., an unused portion), and the DIO₃ is recaptured by areclaim system.

Generally, the reclaim system recaptures and recirculates the expelledliquid with a buffer contactor and a pump (e.g., a centrifugal pump).Since the liquid can be pressure-less (e.g., at an ambient pressure),gas bubbles can be avoided at any inlets of the fluid delivery system,as well as in the pump. The reclaim system can use the contactor topurge a portion of unwanted gas from the liquid before the pumprecirculates the liquid back to the fluid delivery system.

FIG. 1A depicts a system 100 that recirculates and reclaimspressure-less liquid (e.g., ozonated deionized water at an ambientpressure) according to an illustrative embodiment of the invention. Byway of overview, such a system can be useful, for example, insemiconductor manufacturing processes that employ tools withpressure-less liquid outlets. Current systems typically waste liquidbecause they either drain out any excess liquid, or are unable toproperly recirculate pressure-less liquids. A system capable ofreclaiming and recirculating pressure-less liquid is advantageous fromboth financial and environmental standpoints.

The system 100 includes a first liquid source (e.g., “tool”) 110, asecond liquid source (e.g., “fluid delivery system”) 120, and a reclaimsystem 140.

Tool

In the illustrated embodiment, the tool 110 performs one or moresemiconductor manufacturing processes (e.g., etching or cleaning ofsemiconductor wafers). In some embodiments, the tool 110 can performother types of processes related to semiconductor manufacturing orotherwise. The tool 110 includes a liquid inlet 111 that is in fluidcommunication with the delivery system 120, and liquid outlets 112, 113that are in fluid communication with the reclaim system 140. In someembodiments, the tool 110 includes multiple tools. In some embodiments,the tool 110 includes any number of inlets and/or outlets.

Fluid Delivery System

The illustrated fluid delivery system 120 can generate and deliverfluids (i.e., liquids and/or gasses) to the tool 110 and the reclaimsystem 140. The fluid delivery system 120 can receive reclaimed liquidfrom the system 140, as discussed further below. In some embodiments,the fluid delivery system 120 comprises a LIQUOZON system.

In the illustrated embodiment, the fluid delivery system 120 includes(i) a liquid outlet 121 in fluid communication with the tool 110, (ii) aliquid inlet 122 in fluid communication with the reclaim system 140, and(iii) a gas outlet 123 in fluid communication with the reclaim system140. Those skilled in the art appreciate that other embodiments caninclude a greater or lesser number of such inlets and/or outlets.

In various embodiments, the liquid is ozonated deionized water (DIO₃),deionized water (DI-water), ultrapure water (UPW), Hydrogen-Flouride(HF), acids, bases, solvents, or any combination thereof. In variousembodiments, the gas is Oxygen (O₂), Carbon Dioxide (CO₂), Ozone (O₃),(N₂), Clean Dry Air (CDA), off-gas (e.g., from the fluid delivery system110) or any combination thereof. Those skilled in the art appreciatethat these are but a few examples of liquids and gasses that can begenerated and delivered by the fluid delivery system 120, and otherembodiments can include other gasses and/or liquids instead of, or inaddition to, those discussed here.

Reclaim System

Generally, the reclaim system 140 reclaims liquid drained from the tool110 for recirculation to the fluid delivery system 120 and the tool 110.In the illustrated embodiment, the reclaim system 140 includes a buffercontactor (or, “contactor”) 150, a first pump 160, a destruct component170, a second pump 180, a third liquid source (or, “fresh liquidsource”) 185, and associated valves V1-V8 and sensors 158, 175. In someembodiments, the liquid is pressure-less.

Buffer Contactor

The illustrated contactor 150 facilitates recirculation and reclaimingof pressure-less liquid (e.g., liquid at an ambient pressure) output bythe tool 110. More specifically, the contactor 150 (i) purges harmful orunwanted gas from the liquid before it recirculates back to the fluiddelivery system 120 and tool 110, and (ii) can allow the system 100 tohandle varying recirculation flows. The varying recirculation flows canbe handled by means of liquid buffering. The contactor (buffer) freshwater can be enriched with wanted gases, in order to, for example, allowfor stable concentration control in the second liquid source 120. In theillustrated embodiment, the contactor 150 can be a column, multiplecolumns, or other suitable shape. For example, the contactor 150 can beone or more packed columns, plate columns, and/or bubble columns.

In the illustrated embodiment, the contactor 150 includes (i) inlets151-154, and (ii) outlets 155-157. Some embodiments can use a greater orlesser number of inlets and/or outlets. The contactor 150 is in fluidcommunication with the tool 110 via contactor inlets 151, 152. Morespecifically, the inlets 151, 152 receive liquid (e.g., DIO₃) releasedby the tool 110 at outlets 112, 113, respectively. The liquid can be atan ambient pressure (i.e., pressure-less). The pressure-less output ofthe tool 110 can be maintained by splitting the liquid flow to thecontactor 150 between two inlets 151, 152. This prevents, for example,sucking at a tool 110 outlet that could cause a negative pressure thatwould interrupt liquid flow from the tool 110. The two outlets 112 and113 of the first liquid source 110 can be connected to the two inlets151 and 152 of the contactor 150 drain lines. The drain line between thetool outlet 112 and the contactor inlet 151 can be approximately 15 mm.The drain line between the tool outlet 113 and the contactor inlet 152can approximately be 6.55 mm. Drain lines on this order can be lessexpensive then, for example, drain lines with a diameter of 40 mm.

In the illustrated embodiment, the contactor 150 is in fluidcommunication with the delivery system 120 via contactor inlet 153. Thecontactor 150 can be supplied with a gas, or mixture of gases, fromoutlet 123 of the fluid delivery system 120. The gas supplied by thefluid delivery system 120 can be used to purge a portion of gas, such asOzone, from liquid in the contactor 150. The supplied gases can include,for example, (i) O₃, (ii) O₂, (iii) CO₂, (iv) N₂, (iv) Clean Dry Air(CDA), (v) inert gas, (vi) doping gas, (vii) off-gas, (viii) off-gasfrom the fluid delivery system 120, or any combination thereof.

The contactor 150 is in fluid communication with the fresh liquid source185 via inlet 154. In the illustrated embodiment, the fresh liquidsource 185 supplies the contactor 150 with a fresh liquid, e.g.,ultrapure water (UPW). The UPW can replace liquid drained from thecontactor 150, e.g., for recirculation via outlet 156 or disposal viaoutlet 157. In some embodiments, the fresh liquid source 185 can be apart of the fluid deliver system 120.

The liquid flow from the fresh liquid source 185 can be based upon thelevel sensor 158 which can monitor and/or control fluid levels in thecontactor 150. The level sensor 158 ensures, for example, that liquidlevels in the contactor 150 remain within a desired level (e.g., not toolow or too high).

The contactor 150 is in fluid communication with the destruct component170 via contactor outlet 155. As discussed above and below, harmful orunwanted gases (e.g., O₃) can be purged from liquid in the contactor 150before the liquid is recirculated. In the illustrated embodiment, thepurged gas (e.g., O₃) is exhausted from contactor outlet 155 to an inlet171 of the destruct component 170.

Destruct Component

The illustrated destruct component 170 converts at least a portion ofgas exhausted from the contactor 150 (e.g., Ozone) into a second gas(e.g., Oxygen). The destruct component 170 can convert the harmful orunwanted gas exhausted from the contactor 150 into a gas that can besafely released into the surrounding the environment, e.g., via outlet172. In the illustrated embodiment, destruct component 170 uses one ormore catalysts (e.g., manganese-oxide (e.g., carulite 200®) with someadditional carbon-based product) to efficiently convert the purged gas(e.g., Ozone) into the second gas (e.g., Oxygen).

Centrifugal Pump

The illustrated first pump 160 draws liquid from the contactor 150 viaoutlet 156 for recirculation, and can pressurize the liquid, e.g., foruse by the tool 110. The pump 160 can additionally pump a portion of theliquid to the fluid delivery system 120, the second pump 180, and/orback to the contactor 150. In the illustrated embodiment, first pump 160is a centrifugal pump, although in other embodiments it may be anothertype of pump (e.g., membrane pump, etc.). The pump 160 is in fluidcommunication with (i) the contactor 150 via pump inlet 161 and pumpoutlet 162, (ii) the fluid delivery system 110 via pump outlet 162, and,optionally, (iii) the second pump 180 via pump outlets 162, 163.

Liquid Jet Pump

The illustrated second pump 180 operates with a small amount ofpressurized DIO₃ to remove gas (e.g., CO₂) from the first pump 160,e.g., to avoid gas enrichment in the pump 160. Alternatively, the secondpump 180 can be operated with CDA instead of DIO₃. In the illustratedembodiment, the second pump 180 is a liquid jet pump. Some embodimentscan use another type of pump, or forgo the second pump altogether.

Heat Exchanger

Generally, liquid temperature in the pump 160 increases as the pump 160cycles. In order to maintain proper operation of the reclaim system 140,and the system 100 overall, the liquid can remain within a certaintemperature window (e.g., 20 to 24° C.). In some embodiments, a heatexchanger is used to maintain the liquid temperature (e.g., within thedesired temperature window). The heat exchanger can be in parallel withthe second pump 180. In other embodiments, the liquid temperature ismaintained by draining a portion of hot liquid from the pump 160.

Valves

In the illustrated embodiment, valves V1-V8 control the flow of gas andliquid between components of the system 100, or within the componentsthemselves. For example, valves V1-V8 can include any of two-way valves,check valves, pilot valves, flow restrictors, variable valves,controlled values, any valve known to those skilled in the art, and/orany combination thereof. Although valves V1-V8 are shown here, thoseskilled in the art appreciate that some embodiments can use a lesser orgreater number of such valves.

Sensors

The system 140 can include a plurality of sensors, such as level sensor158 and gas flow meter 175. The sensor 158 can be used to monitor and/orcontrol the liquid and/or gas levels in the contactor 150. Theillustrated gas flow meter 175 monitors the flow rate of the gasexhausted by the destruct component 170 via outlet 172. This informationcan be used for system control. For example, the gas flow meter 175 canreact fast to volume changes of the contactor liquid content than thelevel sensor 158 can detect it. Level changes can be delayed due to, forexample, slow trickling of the liquid through the contactor 150. Theinformation from the gas flow meter 175 can allow a better dynamicsystem control and system stability to, for example, ensure an adequateliquid supply for the second liquid source 120. The level sensor 158 canprovide an indication of the steady state level.

Additional sensors (not shown) can be used to monitor and/or controlparameters such as flow rate or pressure of the gases and liquids inother parts of the system 140.

Second Contactor

In some embodiments, a second contactor is used to further purgeunwanted gas from the liquid. FIG. 1A is a diagram 102 of a system forrecirculating and reclaiming liquid (e.g., ozonated deionized water),according to an illustrative embodiment of the invention. A secondcontactor 190 is in fluid communication with the first contactor 150,the pump 160, the pump 180, the third liquid source 185, the secondliquid source 122 and a level 191.

The second contactor 190 receives the liquid output from the firstcontactor 150 via outlet 156 at a first inlet 193 of the secondcontactor 190, the liquid having a first portion of unwanted gas purgedby the first contactor 150. The pump 180 and the valve V9 can act as avacuum to allow the liquid from the first contactor 150 to flow to thesecond contactor 190.

The second contactor 190 receives liquid (e.g., ultrapure water) fromthe third liquid source 185 at a second contactor inlet 194. The secondcontactor 190 purges a second portion of unwanted gas from the liquid.The second contactor 190 has liquid drawn out from outlet 192 by pump160. A first portion of the liquid exiting the second contactor 190flows into the second liquid source 120 via inlet 122. A second portionof the liquid exiting the second contactor 190 flows back into thecontactor 150 via inlet 154.

The second contactor 190 is in communication with level 191. The level191 can detect the fluid level within the second contactor 190.

FIGS. 2A and 2B are flow charts showing exemplary methods forrecirculating and reclaiming liquid, according to illustrativeembodiments of the invention. For illustrative purposes, therecirculation and degassing are shown in two separate flow charts, FIG.2A and FIG. 2B, respectively. Although the steps are discussed in aparticular order, those skilled in the art appreciate that the steps canbe performed in a different order, or simultaneously with other steps,with respect to one or both Figures.

Recirculation Method

FIG. 2A, more particularly, is a flow chart illustrating an exemplaryrecirculation method according to an illustrative embodiment of theinvention.

In step 200, a liquid (e.g., DIO₃) is supplied to a first liquid source(e.g., tool 110, as described above in FIG. 1A) from a second liquidsource (e.g., fluid delivery system 120, as described above in FIG. 1A).For example, referring to FIG. 1A, the liquid can be supplied to a toolinlet 111 via the fluid delivery system outlet 121.

In step 210, a contactor (e.g., contactor 150, as described, above inFIG. 1A) receives liquid at an ambient pressure from the first liquidsource (e.g., at contactor inlets 151, 152, as described above in FIG.1A). Ambient pressure can be maintained by, for example, allowing gasflowing out of the contactor inlet 152 to the liquid outlet 112 viaoutlet 113 from the first liquid source 110. This configuration, forexample, maintains a consistent flow control within the first liquidsource and prevents negative pressure buildup at any of its outlets.

In step 220, the contactor drains a portion of the liquid received fromthe first liquid source. More specifically, a first pump (e.g., acentrifugal pump 160, as described above in FIG. 1A) pumps the liquidfrom contactor (e.g., via contactor outlet 156, as described above inFIG. 1A). The drained liquid can be pressurized by the first pump, asshown in step 230.

As liquid in the first pump is cycling, the liquid absorbs theelectrical energy used to operate the first pump, thereby increasing atemperature of the liquid. In order to maintain continued recirculation,the liquid temperature is monitored and controlled, as shown in step240. In some embodiments, a heat exchanger (e.g., heat exchanger, asdescribed above in FIG. 1A) is used to ensure that the liquid stayswithin permissible operating temperatures (e.g., 20 to 24° C.). Inaddition to, or instead of using a heat exchanger, a portion of hotliquid can be drained from the first pump in order to maintain theproper temperature window.

In order to ensure that gas buildup in the first pump does not interferewith its operation, gas can be removed from the first pump with anoptional second pump (e.g., liquid jet pump 180, as described above inFIG. 1A), as shown in step 250.

In step 260, liquid drained from the contactor is replaced with a freshliquid (e.g., UPW) from a third liquid source (e.g., third liquid source185, as described above in FIG. 1A). Since fresh liquid may not containthe necessary gas (e.g., Ozone), off-gas from the fluid delivery systemcan be supplied to the contactor in order to maintain a constant, orsubstantially constant, gas (e.g., Ozone) concentration therein.

Liquid levels within the contactor are monitored via a sensor (e.g.,level sensor 158, as described above in FIG. 1A), and flow rate from thethird liquid source is controlled to ensure an optimal liquid levelwithin the contactor. There can be a linear flow rate of fresh liquidfrom the third liquid source to the contactor.

In step 270, the first pump pumps a portion of the liquid to the fluiddelivery system 120 (e.g., at inlet 122, as described above in FIG. 1A),and a portion of the liquid back to the contactor. In some embodiments,liquid pumped back to the contactor is mixed with fresh liquid from thethird liquid source before the fresh liquid is received by the contactor(e.g., via inlet 154, as described above in FIG. 1A). Mixing a portionof liquid from the first pump with the fresh liquid can ensure, forexample, that liquid in the contactor maintains appropriate gas (e.g.,Ozone) levels, since the fresh liquid may not contain the required gas.

Degassing Method

FIG. 2B, more particularly, is a flow chart illustrating an exemplarydegassing method according to one embodiment of the invention.

In step 300, a contactor (e.g., contactor 150, as described above inFIG. 1A) receives one or more gasses at a contactor inlet from a secondliquid source (e.g., fluid delivery system 120, as described above inFIG. 1A). For example, referring to FIG. 1A, gas can be supplied tocontactor inlet 153 from fluid delivery system outlet 123. The one ormore gasses can be (i) O₃, (ii) O₂, (iii) CO₂, (iv) N₂, (iv) Clean DryAir (CDA), (v) inert gas, (vi) doping gas, (vii) off-gas, (viii) off-gasfrom the second liquid source, or any combination thereof.

In step 310, the received gas purges a portion of harmful or unwantedgas (e.g., Ozone) from liquid in the contactor. For example, the gas canbe purged due to the differential partial pressure of the unwanted orharmful gas in the liquid. The purged gas is exhausted from thecontactor to a destruct component (e.g., destruct component 170, asdescribed above in FIG. 1A), as shown in step 320. For example,referring to the FIG. 1A, the purged gas can be exhausted from contactoroutlet 155 to destruct component inlet 171. Optionally, the purged gascan be heated and/or diluted with CDA or other inert gas, e.g., toreduce the dew point of the gas, thereby preventing or reducingcondensation inside the destruct component 170, as shown in step 330.

In step 340, the destruct component converts the purged gas (e.g.,Ozone) into a second gas (e.g., Oxygen). As described above in FIG. 1A,destruct component can use one or more catalysts (e.g., manganese-oxidewith some additional carbon-based product) to convert the purged gasinto the second gas. The second gas is then released, or exhausted, viaan outlet of the destruct component, into the surrounding environment ina safe manner, as shown in step 350. For example, referring to FIG. 1A,the second gas can be exhausted via destruct component outlet 172.

In step 360, a gas flow at the outlet of the destruct component ismeasured. The measurements can be used to system control. For example,referring to FIG. 1A, the gas flow meter 175 can measure the gas flow atoutlet 172 of the destruct component.

Variations, modifications, and other implementations of what isdescribed herein will occur to those of ordinary skill in the artwithout departing from the spirit and the scope of the invention.Accordingly, the invention is not to be limited only to the precedingillustrative descriptions.

What is claimed is:
 1. A system for recirculating ozonated liquid in asemiconductor manufacturing process, comprising: a contactor includingat least two inlets and at least two outlets, the contactor being influid communication with a first liquid source comprising a tool at afirst contactor inlet and a second liquid source at a second contactorinlet, the tool being configured to perform the semiconductormanufacturing process, the second contactor inlet receiving gas thatpurges at least a portion of gas from the ozonated liquid received atthe first contactor inlet from the tool of the first liquid source, thepurged gas exiting the contactor at a first contactor outlet, whereinthe contactor is in fluid communication with the second liquid source ata second contactor outlet, the contactor draining at least a portion ofthe purged ozonated liquid in the contactor, the drained liquid exitingthe contactor at the second contactor outlet for supply to the secondliquid source connected to the tool.
 2. The system of claim 1, whereinat least a portion of the ozonated liquid received at the firstcontactor inlet comprises at least a portion of the liquid drained fromthe contactor via the second contactor outlet.
 3. The system of claim 1,wherein the contactor includes a third inlet in fluid communication witha third liquid source, the third inlet receiving fresh liquid from thethird liquid source that replaces at least a portion of the liquiddrained from the contactor.
 4. The system of claim 1, wherein thecontactor comprises any of a packed column, plate column, or bubblecolumn.
 5. The system of claim 1, further comprising a first pump influid communication with the contactor via a) at least one inlet of thefirst pump being in fluid communication with the second outlet of thecontactor, and b) an outlet of the first pump being in fluidcommunication with the second liquid source.
 6. The system of claim 5,wherein the outlet of the first pump is in fluid communication with thecontactor via a third inlet of the contactor.
 7. The system of claim 5,where in the first pump comprises a centrifugal pump.
 8. The system ofclaim 1, further comprising a destruct component that includes at leastan inlet, the inlet of the destruct component in fluid communicationwith the first contactor outlet.
 9. The system of claim 8, wherein theinlet of the destruct component receives at least a portion of the gaspurged by the contactor.
 10. The system of claim 9, wherein the gasreceived at the inlet of the destruct component is heated or dilutedwith clean dry air (CDA) or other inert gas.
 11. The system of claim 9,wherein an outlet of the destruct component exhausts at least a portionof the purged gas received at the inlet of the destruct component. 12.The system of claim 11, wherein the gas flow at the outlet of thedestruct component is measured and the information is used for systemcontrol.
 13. The system of claim 11, wherein the destruct component usesa catalyst to convert the received gas into oxygen and exhausts theoxygen via the outlet of the destruct component.
 14. The system of claim13, wherein the catalyst comprises any of (i) manganese-oxide basedproduct or (ii) a carbon-based product.
 15. The system of claim 1,wherein any of the liquid (i) received at the first inlet of thecontactor or (ii) drained from the second outlet of the contactorcomprises ozonated deionized water (DIO₃).
 16. The system of claim 1,wherein the gas received at the second inlet of the contactor comprises(i) O₃, (ii) O₂, (iii) CO₂, (iv) N₂, (iv) Clean Dry Air (CDA), (v) inertgas, (vi) doping gas, (vii) off-gas, (viii) off-gas from the secondliquid source, or any combination thereof.
 17. The system of claim 1,wherein the portion of gas purged from the liquid comprises (i) O₃, (ii)O₂ (iii) CO₂, or any combination thereof.
 18. The system of claim 17,wherein the gas received at the second inlet of the contactor is theoff-gas from the second liquid source.
 19. The system of claim 1,wherein a temperature of the ozonated liquid is measured and atemperature of the ozonated liquid is controlled via a heat exchanger orby liquid discarding.
 20. The system of claim 1, wherein the secondliquid source comprises a DIO₃ water delivery system.
 21. The system ofclaim 5, further comprising a second pump being in fluid communicationwith any of (i) the first outlet of the first pump, or (ii) a secondoutlet of the first pump.
 22. The system of claim 21, wherein the secondpump comprises a jet pump.
 23. The system of claim 1, further comprisinga second contactor in fluid communication with the contactor, the secondcontactor configured to receive at a first inlet at least a portion ofthe drained ozonated liquid from the contactor, purge a second portionof gas from the drained ozonated liquid, and release at a first outletthe drained ozonated liquid having the second portion of gas purged tothe contactor.